Heewon Choi, Juhwa Min, Yongsug Suh "Inductor design rule in electrical variable capacitor for 13.56MHz RF plasma impedance matcher" THE KOREAN INSTITUTE OF POWER ELECTRONICS of Power Electronics Conference, 2022
Heewon Choi, Juhwa Min, Yongsug Suh
"Inductor design rule in electrical variable capacitor for 13.56MHz RF plasma impedance matcher"
THE KOREAN INSTITUTE OF POWER ELECTRONICS of Power Electronics Conference, 2022