Heewon Choi, Juhwa Min, Yongsug Suh "Inductor Design Rule in Electrical Variable Capacitor for 13.56 MHz RF Plasma Impedance Matcher with Optimized Variable Speed" THE TRANSACTIONS OF KOREAN INSTITUTE OF POWER ELECTRONICS, 2023
Heewon Choi, Juhwa Min, Yongsug Suh
"Inductor Design Rule in Electrical Variable Capacitor for 13.56 MHz RF Plasma Impedance Matcher with Optimized Variable Speed"
THE TRANSACTIONS OF KOREAN INSTITUTE OF POWER ELECTRONICS, 2023