- 작성일
- 2023.09.04
- 수정일
- 2023.11.09
- 작성자
-
친환경에너지변환연구실
- 조회수
- 243
Juhwa Min, Heewon Choi, Yongsug Suh "Resonance Type Auto Bias Electrical Variable Capacitor with Improved Switch Reliability for 13.56MHz RF Plasma System" ICPE 2023 - ECCE Asia, May. 2023.
Juhwa Min, Heewon Choi, Yongsug Suh
"Resonance Type Auto Bias Electrical Variable Capacitor with Improved Switch Reliability for 13.56MHz RF Plasma System"
ICPE 2023 - ECCE Asia, May. 2023.