fnctId=bbs,fnctNo=2932
- 작성일
- 2023.09.04
- 수정일
- 2023.11.09
- 작성자
- 친환경에너지변환연구실
- 조회수
- 242
Juhwa Min, Heewon Choi, Yongsug Suh "Resonance Type Auto Bias Electrical Variable Capacitor with Improved Switch Reliability for 13.56MHz RF Plasma System" ICPE 2023 - ECCE Asia, May. 2023.
Juhwa Min, Heewon Choi, Yongsug Suh
"Resonance Type Auto Bias Electrical Variable Capacitor with Improved Switch Reliability for 13.56MHz RF Plasma System"
ICPE 2023 - ECCE Asia, May. 2023.
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- 첨부파일이(가) 없습니다.