Heewon Choi, Hongmin Kim, Cheonghyeon Hwang, Cheonyong Lim, Yongsug Suh "Resonance Type Electrical Variable Capacitor with Reduced Active Devices Loss for 13.56 MHz RF Plasma System" IPEMC2024-ECCE Asia, May. 2024.
Heewon Choi, Hongmin Kim, Cheonghyeon Hwang, Cheonyong Lim, Yongsug Suh
"Resonance Type Electrical Variable Capacitor with Reduced Active Devices Loss for 13.56 MHz RF Plasma System"