박우진 학생의 plasma-wall interaction 관련 Applied Surface Science Advances 논문 출간을 축하합니다.

Structural and chemical evolution of fluorocarbon coatings on reactor walls and their run-to-run impacts on film deposition in C4F8/Ar/N2 plasma processing

Woojin Park, Sangjun Park, Jonggu Han, Solee Park, Se Youn Moon 

Applied Surface Science Advances

Volume 32, March 2026, 100952

https://doi.org/10.1016/j.apsadv.2026.100952