Human–machine collaboration for improving semiconductor process development

• Keren J. Kanarik, 
• Wojciech T. Osowiecki, 
• Yu (Joe) Lu, 
• Dipongkar Talukder, 
• Niklas Roschewsky, 
• Sae Na Park, 
• Mattan Kamon, 
• David M. Fried & 
• Richard A. Gottscho 

Nature (2023)

https://doi.org/10.1038/s41586-023-05773-7