전북대학교
| Period |
Fund Source |
Project Title |
| 2023.07-2027.07 |
Ministry of SEMs and Startups |
Development of RF plasma bar-type VUV for OLED |
| 2024.08-2027.12 |
Ministry of Trade, Industry and Enregy |
Development of customized high speed transfer system and plasma core technology of ALE for high-K dielectric etching |
| 2022.10-2027.06 |
NRF, KOREA (Nano) |
Estimation technology of surface material performance via high-enthalpy thermal load environment development |
| 2022.03-2023.12 |
Korea Institute of Fusion Energy |
Development of atmospheric pressure plasma technology for high-carbon based byproduct in high-temperature condition |
| 2021.12-2026.12 |
Korea Research Institute for defense Technology |
BNNT composite for space and military applications research laboratory (BT4) |
| 2022.03-2027.02 |
SEMES |
Plasma radical and chamber wall contamination monitoring technology |
| 2022.04-2024.12 |
Samsung Electronics |
Development of plasma spectroscopy and synthetic molecular spectra model |
| 2021.04-2021.10 |
Samsung Electronics |
Development of HDP VUV monitoring technology |
| 2020.06-2023.05 |
NRF, KOREA (Basic) |
Mechanistic study of plasma photon damages during semiconductor processes |
| 2020.01-2023.12 |
Korea Institute of Science and Technology |
Control of BNNT and by-products synthesis by high temperature plasma method |
| 2020.11-2021.10 |
Korea Institute of Fusion Energy |
Development of smart sensing technology based on plasma spectroscopy |
| 2020.09-2020.12 |
NRF KOREA (Bridge+) |
Low-temperature plasma technology for escalator hand- rail sterilization |
| 2020.04-2020.10 |
Samsung Electronics |
Plasma VUV monitoring technology |
| 2017.06-2020.05 |
NRF, KOREA (Basic) |
Oil-water separation based on bio-inspired surface wettabilty functionalization |
| 2017.01-2020.12 |
POSCO |
Advanced APP-CVD for metal oxide deposition |