1. Atmospheric pressure plasma (APP) applications
- Surface functionalization using APP treatment
Oil-water separation membrane, Adhesion Enhancement. Surface wettability control
- Fast thin-layer deposition
TiO2, SiO2, AlO2 deposition, low-k material deposition
- Surface cleaning and sterilization
- Plasma source development for bio-medical application
2. Plasma diagnostics
- Optical Emission Spectroscopy and Absorption Spectroscopy
- Spectroscopic measurement of plasma parameters
- UV/VUV emission and absorption spectroscopy
3. Plasma Processing &Surface interaction
- Low pressure plasma application for Semiconductor processing
- VUV damages on the surface
- Surface modification and polymer deposition
4. Plasma-Gas conversion
- Reduction of Carbon-based byproduct by plasma
- Synthetic gas or Hydrogen production
5. Thermal plasma application (with High-entalphy Plasma Research Center)
- Boron nitride nanotube (BNNT) synthesis
- Ultra-high temperature ceramic coatings